Mask frame assembly for thin layer deposition, method of manufacturing the same and method of manufacturing display device by using the mask frame assembly

ABSTRACT

A mask frame assembly manufactured via an extension-welding process on a stage, the mask frame assembly includes: a mask frame disposed on a stage, the mask frame including a first frame and a second frame having a first length, and a third frame and a fourth frame having a second length, the second length less than the first length. The mask frame assembly also includes a mask having respective ends welded and combined onto the first frame and the second frame. The first frame and the second frame include a slot disposed toward the stage, and at least portions of the first frame and the second frame corresponding to the slot are not in contact with the stage. The third frame and the fourth frame and the stage are in contact with the stage.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority from and the benefit of Korean PatentApplication No. 10-2015-0155789, filed on Nov. 6, 2015, which is herebyincorporated by reference for all purposes as if fully set forth herein.

BACKGROUND

Field

Exemplary embodiments relate to a mask frame assembly for a thin layerdeposition, a method of manufacturing the same and a method ofmanufacturing a display device by using the mask frame assembly.

Discussion of the Background

An organic light emitting display device is an active light emittingtype flat display device. In general, the organic light emitting displaydevice has a wide viewing angle, improved contrast, comparably low powerconsumption, and a thin profile with a light weight and a fast responsespeed.

A light emitting device may be an inorganic light emitting device and anorganic light emitting device, depending on materials included in alight emitting layer. The organic light emitting device has improvedluminance characteristics, response speed, etc. than the inorganic lightemitting device. Thus, research has been actively made to develop theorganic light emitting device.

The organic layers and/or electrodes of an organic light emittingdisplay device may be formed via a vacuum deposition method. As aresolution of organic light emitting display devices graduallyincreases, a width of an open slit of a mask used in a depositionprocess decreases, and therefore, a dispersion of deposition materialneeds to be reduced.

In addition, a shadow effect needs to be reduced or eliminated tomanufacture a high resolution organic light emitting display device.Accordingly, the deposition process may be performed with a substrateand the mask adhered to each other, and thus, research has been made toenhance the adherence between the substrate and the mask.

A mask may include a plurality of masks having an elongated stick-likeshape or formed as one consolidated mask and welded to a mask frame. Ina welding process of the mask to the frame, the mask may be extendedalong a length direction and welded onto the frame to reduce or preventa droop phenomenon due to the weight of the mask. After the mask and theframe have been welded, a restoring force may be applied to the maskcorresponding to an extension force having been applied to the mask, andthus, shapes of the mask and the mask frame may be changed due to therestoring force.

During the extension-welding process of the mask and the frame, theframe may be arranged on a stage and a certain extension force may beapplied to the frame to compensate for the restoring force applied tothe mask.

However, the extension force to be applied to the frame to compensatefor the restoring force applied to the mask may not be accuratelycalculated due to a frictional force generated between the stage and theframe during the extension-welding process of the mask.

The above information disclosed in this Background section is only forenhancement of understanding of the background of the inventive concept,and, therefore, it may contain information that does not form the priorart that is already known in this country to a person of ordinary skillin the art.

SUMMARY

Exemplary embodiments provide a mask frame assembly having improvedprecision, method of manufacturing the same, and method of manufacturingdisplay device by using the same.

Additional aspects will be set forth in part in the description whichfollows and, in part, will be apparent from the description, or may belearned by practice of the inventive concept.

An exemplary embodiment discloses a mask frame assembly manufactured viaan extension-welding process on a stage, the mask frame assemblyincluding: a mask frame disposed on a stage, the mask frame including afirst frame and a second frame having a first length, and a third frameand a fourth frame having a second length, the second length less thanthe first length. The mask frame assembly also includes a mask havingrespective ends welded and combined onto the first frame and the secondframe. The first frame and the second frame include a slot disposedtoward the stage, and at least portions of the first frame and thesecond frame corresponding to the slot are not in contact with thestage. The third frame and the fourth frame and the stage are in contactwith the stage.

An exemplary embodiment discloses a method of manufacturing a mask frameassembly, the method including: disposing a mask frame on a stage, themask frame including a first frame and a second frame having a firstlength, and a third frame and a fourth frame having a second length, thesecond length less than the first length; applying a first extensionforce to the mask by clamping both ends of the mask in a lengthdirection of the mask; applying a second extension force to the firstframe and the second frame on which both ends of the mask are disposed,the second extension force having an direction opposite to the firstextension force; and welding respective ends of the mask to the firstframe and the second frame, wherein the first frame and the second frameinclude a slot disposed toward the stage, and wherein at least portionsof the first frame and the second frame corresponding to the slot not incontact with the stage, and the third frame and the fourth frame and thestage are in contact with the stage.

An exemplary embodiment also discloses a method of manufacturing adisplay device which includes a first electrode and a second electrodefacing each other on a substrate and an organic layer disposed betweenthe first electrode and the second electrode, the method includingdepositing the organic layer and depositing the second electrode on theorganic layer using a mask frame, wherein the mask frame assemblyincludes mask frame including a first frame and a second frame having afirst length, and a third frame and a fourth frame having a secondlength, the second length less than the first length, and a mask havingrespective ends welded and combined onto the first frame and the secondframe, and wherein the first frame and the second frame include a slotdisposed facing away from the mask.

The foregoing general description and the following detailed descriptionare exemplary and explanatory and are intended to provide furtherexplanation of the claimed subject matter.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the inventive concept, and are incorporated in andconstitute a part of this specification, illustrate exemplaryembodiments of the inventive concept, and, together with thedescription, serve to explain principles of the inventive concept.

FIG. 1 is a schematic perspective view of a mask frame assembly,according to one or more exemplary embodiments.

FIG. 2 is a cross-sectional view of a frame in FIG. 1 along a y-axisdirection, according to one or more exemplary embodiments.

FIG. 3 is a conceptual view of disposing a deposition layer onto asubstrate using the mask frame assembly of FIG. 1, according to one ormore exemplary embodiments.

FIG. 4 is a perspective view of a mask extension-welding device tomanufacture the mask frame assembly 100 of FIG. 1, according to one ormore exemplary embodiments.

FIG. 5 is a schematic perspective view of the method of manufacturingthe mask frame assembly of FIG. 1, according to one or more exemplaryembodiments.

FIG. 6 is a schematic exploded view of the method of manufacturing themask frame assembly of FIG. 1, according to one or more exemplaryembodiments.

FIG. 7 is a schematic perspective view of the method of manufacturingthe mask frame assembly of FIG. 1, according to one or more exemplaryembodiments.

FIG. 8 is a cross-sectional view of a frame in FIG. 2, according to oneor more exemplary embodiments.

FIG. 9 is a cross-sectional view of a frame in FIG. 2, according to oneor more exemplary embodiments.

FIG. 10 is a plan view of a frame in FIG. 2, according to one or moreexemplary embodiments.

FIG. 11 is a cross-sectional view of one sub-pixel of an organic lightemitting device with a light emitting layer manufactured using thedevice of a display device illustrated in FIG. 3, according to one ormore exemplary embodiments.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

In the following description, for the purposes of explanation, numerousspecific details are set forth in order to provide a thoroughunderstanding of various exemplary embodiments. It is apparent, however,that various exemplary embodiments may be practiced without thesespecific details or with one or more equivalent arrangements. In otherinstances, well-known structures and devices are shown in block diagramform in order to avoid unnecessarily obscuring various exemplaryembodiments.

In the accompanying figures, the size and relative sizes of layers,films, panels, regions, etc., may be exaggerated for clarity anddescriptive purposes. Also, like reference numerals denote likeelements.

When an element or layer is referred to as being “on,” “connected to,”or “coupled to” another element or layer, it may be directly on,connected to, or coupled to the other element or layer or interveningelements or layers may be present. When, however, an element or layer isreferred to as being “directly on,” “directly connected to,” or“directly coupled to” another element or layer, there are no interveningelements or layers present. For the purposes of this disclosure, “atleast one of X, Y, and Z” and “at least one selected from the groupconsisting of X, Y, and Z” may be construed as X only, Y only, Z only,or any combination of two or more of X, Y, and Z, such as, for instance,XYZ, XYY, YZ, and ZZ. Like numbers refer to like elements throughout. Asused herein, the term “and/or” includes any and all combinations of oneor more of the associated listed items.

Although the terms first, second, etc. may be used herein to describevarious elements, components, regions, layers, and/or sections, theseelements, components, regions, layers, and/or sections should not belimited by these terms. These terms are used to distinguish one element,component, region, layer, and/or section from another element,component, region, layer, and/or section. Thus, a first element,component, region, layer, and/or section discussed below could be termeda second element, component, region, layer, and/or section withoutdeparting from the teachings of the present disclosure.

Spatially relative terms, such as “beneath,” “below,” “lower,” “above,”“upper,” and the like, may be used herein for descriptive purposes, and,thereby, to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the drawings. Spatiallyrelative terms are intended to encompass different orientations of anapparatus in use, operation, and/or manufacture in addition to theorientation depicted in the drawings. For example, if the apparatus inthe drawings is turned over, elements described as “below” or “beneath”other elements or features would then be oriented “above” the otherelements or features. Thus, the exemplary term “below” can encompassboth an orientation of above and below. Furthermore, the apparatus maybe otherwise oriented (e.g., rotated 90 degrees or at otherorientations), and, as such, the spatially relative descriptors usedherein interpreted accordingly.

The terminology used herein is for the purpose of describing particularembodiments and is not intended to be limiting. As used herein, thesingular forms, “a,” “an,” and “the” are intended to include the pluralforms as well, unless the context clearly indicates otherwise. Moreover,the terms “comprises,” “comprising,” “includes,” and/or “including,”when used in this specification, specify the presence of statedfeatures, integers, steps, operations, elements, components, and/orgroups thereof, but do not preclude the presence or addition of one ormore other features, integers, steps, operations, elements, components,and/or groups thereof.

Various exemplary embodiments are described herein with reference tosectional illustrations that are schematic illustrations of idealizedexemplary embodiments and/or intermediate structures. As such,variations from the shapes of the illustrations as a result, forexample, of manufacturing techniques and/or tolerances, are to beexpected. Thus, exemplary embodiments disclosed herein should not beconstrued as limited to the particular illustrated shapes of regions,but are to include deviations in shapes that result from, for instance,manufacturing. For example, an implanted region illustrated as arectangle will, typically, have rounded or curved features and/or agradient of implant concentration at its edges rather than a binarychange from implanted to non-implanted region. Likewise, a buried regionformed by implantation may result in some implantation in the regionbetween the buried region and the surface through which the implantationtakes place. Thus, the regions illustrated in the drawings are schematicin nature and their shapes are not intended to illustrate the actualshape of a region of a device and are not intended to be limiting.

Unless otherwise defined, all terms (including technical and scientificterms) used herein have the same meaning as commonly understood by oneof ordinary skill in the art to which this disclosure is a part. Terms,such as those defined in commonly used dictionaries, should beinterpreted as having a meaning that is consistent with their meaning inthe context of the relevant art and will not be interpreted in anidealized or overly formal sense, unless expressly so defined herein.

FIG. 1 is a schematic perspective view of a mask frame assembly 100according to one or more exemplary embodiments, FIG. 2 is across-sectional view of a frame in FIG. 1 along a y-axis direction,according to one or more exemplary embodiments, and FIG. 3 is aconceptual view of disposing a deposition layer onto a substrate usingthe mask frame assembly 100 of FIG. 1, according to one or moreexemplary embodiments.

Referring to FIGS. 1 and 2, the mask frame assembly 100 may include amask frame 110 and a plurality of masks 120. The mask frame 110 mayinclude an opening 115 and a plurality of frames including first,second, third, and fourth frames 111, 112, 113, and 114, surrounding theopening 115. The first, second, third, and fourth frames 111, 112, 113,and 114 may be connected with each other.

The mask frame 110 may include the first frame 111 and the second frame112 disposed facing each other in an x-axis direction, extending along ay-axis direction, and the third frame 113 and the fourth frame 114disposed facing each other in the y-axis, extending along the x-axisdirection.

The first frame 111 and the second frame 112 may each have a firstlength, and the third frame 113 and the fourth frame 114 may each have asecond length, wherein the second length is shorter than the firstlength. The first frame 111, the second frame 112, the third frame 113and the fourth frame 114 may be connected with each other to form themask frame 110 in a rectangular frame shape. The mask frame 110 mayinclude a material that may have reduced deformation during welding ofthe mask 120, for example, a metal with a high rigidity.

The first frame 111 and the second frame 112 may include a slot 116toward a stage 50 (refer to FIG. 6) so that at least portions of thefirst frame 111 and the second frame 112 may not directly contact thestage 50 during an extension-welding process of the mask 120. However,the extension-welding process may be performed while the third frame 113and the fourth frame 114 directly contact the stage 50.

A slot 116 may be formed in a direction along a length direction of thefirst frame 111 and the second frame 112 (the y-axis direction) andthroughout the entire lengths of the first frame 111 and the secondframe 112 facing the stage 50, and an entire portion of the first frame111 and the second frame 112 may not directly contact the stage 50. Aneffect of including the slot 116 on the first frame 111 and the secondframe 112 will be described in detail below with reference to FIGS. 4,5, 6, and 7.

The mask 120 may be arranged on the mask frame 110. An adhesion betweenthe mask 120 and a substrate S (refer to FIG. 3) disposed on the mask120 may be enhanced to reduce a shadow effect for a precise depositionpattern. The mask 120 may be a thin plate made of materials including atleast one of stainless steel, invar, nickel (Ni), Cobalt (Co), a nickelalloy, a Ni—Co alloy, etc.

A plurality of masks 120 may be separated from each other in the y-axisdirection to prevent or reduce a droop phenomenon due to the weightsthereof. The mask 120 may have an elongated stick-like shape(hereinafter, stick shape). The mask 120 may have a width less than alength thereof, but the exemplary embodiments are not limited thereto.

The mask 120 may be separated in a direction along the y-axis, crossingwith the extension direction (the x-axis) thereof. In more detail, theplurality of masks 120 may be repeatedly arranged between the thirdframe 113 and the fourth frame 114, and both ends of each mask 120 maybe welded and/or affixed onto the first frame 111 and the second frame112. The plurality of the masks 120 may cover the opening 115.

The mask 120 may be a stick shape mask divided from the plurality ofmasks 120, and may include a plurality of pattern holes 121, a rib unit122 connecting between the plurality of pattern holes 121, and aclamping unit 123 extending from the mask 120 which may be removed afterthe extension-welding process on the mask 120. A deposition material maybe deposited through the plurality of pattern holes 121 onto thesubstrate S (refer to FIG. 3) and thus, a deposition region on thesubstrate may be defined.

The mask 120 may be a thin film having magnetic properties, and includenickel or a nickel alloy. The mask 120 may also include a Ni—Co alloy,and the mask 120 may have an improved fine pattern and reduced surfaceroughness.

According to one or more exemplary embodiments, the mask 120 may bemanufactured by using various methods. For example, the mask 120 may bemanufactured by using an etching method, including disposing aphotoresist layer or a film having a pattern identical onto theplurality of pattern holes 121 onto the thin film, and etching the thinfilm after attaching the photoresist layer or the film having thepattern of the pattern hole 121 to the thin film. The mask 120 may alsobe manufactured using electro-forming or electroless plating.

The pattern hole 121 illustrated in the drawing FIGS. 1 and 2 is anexemplary embodiment, but the exemplary embodiments are not limitedthereto, and therefore, the pattern hole 121 may have various numbers,arrangements, and shapes. For example, the pattern hole 121 may totallyexpose the opening or the pattern hole 121 may have a stripe shape.

Referring to FIG. 3, a vacuum chamber 201 may be used in depositing anorganic light emitting layer or an electrode of an organic lightemitting display device by using the mask frame assembly 100.

A deposition source 202 may be disposed in the lower space within thevacuum chamber 201, and the mask frame assembly 100 may be disposed inthe top space within the deposition source 202.

The mask frame assembly 100 may include the plurality of masks 120illustrated in FIG. 1. The plurality of masks 120 may be disposed on themask frame 110. The substrate S may be disposed on the plurality ofmasks 120. A supporting member 203 may be included at edges of the maskframe assembly 100 to affix the mask frame assembly 100. Subsequently,the deposition material may be deposited onto the substrate S.

The mask frame assembly 100 may be affixed or attached onto thesupporting member 203, and the substrate S, on which the depositionmaterial is deposited, may be disposed on the mask 120. Next, thedeposition material may be sprayed from the deposition source 202disposed in the lower space within the vacuum chamber 201 toward themask frame assembly 100, and the deposition material may be depositedonto one surface of the substrate S through the mask 120.

According to one or more exemplary embodiments, improved precision ofwelding between the mask 120 and the mask frame 110 may improve aprecision of a deposition pattern at a desired location on the substrateS. In other words, an adhesion force between the mask frame 110 and themask 120 may be increased by minimizing or reducing an empty spacebetween the mask frame 110 and the mask 120 in a region where the maskframe 110 and the mask 120 are welded together. After the mask 120 hasbeen welded to the mask frame 110, the deformation of the mask frame 110or the mask 120 may be minimized or reduced and the deposition materialmay be deposited onto the substrate S with improved precision. Accordingto one or more exemplary embodiments, the mask frame assembly 100described in detail below with reference to FIGS. 4, 5, 6, and 7 mayhave reduced or minimized deformation.

FIG. 4 is a perspective view of a mask extension-welding device tomanufacture the mask frame assembly 100 of FIG. 1, according to one ormore exemplary embodiments.

Referring to FIG. 4, a frame 310 may be a frame having a rectangularshape. The frame 310 may include a first frame 311 and a second frame312 facing each other in an x-axis direction and extending along ay-axis direction, and a third frame 313 and a fourth frame 314 facingeach other in the y-axis and extending along the x-axis direction.

A plurality of masks 320 may be separately arranged in the y-axisdirection on the frame 310. The mask 320 may have a width less than alength thereof.

The mask 320 may include a plurality of pattern holes 321 minutelyseparated from each other. The pattern holes 321 may have a patternidentical with the deposition layer to be deposited onto the substrate.the mask 320 may also include a rib unit 322 between adjacent patternholes 321. The rib unit 322 may connect the pattern holes 321 together,arranging the pattern holes 321 along the length direction (the x-axisdirection) of the mask 320.

According to one or more exemplary embodiments, the frame 310 and themask 320 may be welded to each other in an area between an outermostdeposition pattern unit 325 and a clamping unit 323 of the mask 320.

Both ends of the mask 320 may be extended along the length direction(the x-axis direction) thereof and be welded onto the frame 310. Themask 320 may be extended by extending the clamping units 323 disposed atboth ends of the mask 320 and both ends of the mask 320 may be weldedonto the first frame 311 and the second frame 312.

According to one or more exemplary embodiments, the maskextension-welding device 300 may be used to weld the mask 320 onto theframe 310. A detailed description thereof is provided below.

The mask extension-welding device 300 may include an extending unit 330,a pressing unit, and a laser welding unit 340.

The mask 320 may be extended along the length direction (the x-axisdirection) thereof. The mask 320 may be extended by the extending unit330. The clamping units 323 may be arranged on the first frame 311 andthe second frame 312 while being extended.

Extending units 330 may extend the mask 320 along the length thereof andaffix the mask 320 onto the frame 310. The extending units 330 mayextend the mask 320 by applying a first tensile force TF_1 to clampingunits 323 of the mask 320 using the extending units 330, and the droopphenomenon due to the weight of the mask 320 may be reduced orprevented. By welding the mask 320 onto the frame 310 with the firsttensile force TF_1 is applied, a wrinkle and/or the drooping of the mask320 may be reduced or prevented, and therefore, an amount of thedeposition material deposited onto the substrate S via the mask 320 thatis deposited outside the deposition region may be reduced or prevented.

According to one or more exemplary embodiments, the extending unit 330may be mask extending clamps. The extending unit 330 may be clamped tothe clamping unit 323 of the mask 320 and extend the mask 320.

The pressing unit may have the mask 320 pressed onto the frame 310. Thepressing units may be arranged adjacent to the clamping unit 323 of themask 320. For example, the pressing unit may be disposed between theoutermost pattern hole 321 and the clamping unit 323 of the mask 320.

The pressing unit may press the mask 320 overlapping the frame 310toward the frame 310. Accordingly, surfaces of the frame 310 and themask 320 facing each other may be pressed to each other.

The laser welding unit 340 may radiate a laser beam onto an innersurface or an outer surface the mask 320 with respect to a surface wherethe pressing unit and the clamping unit 323 of the mask 320 contact witheach other.

FIG. 5 is a schematic perspective view of the method of manufacturingthe mask frame assembly 100 of FIG. 1, according to one or moreexemplary embodiments.

Referring to FIG. 5, the mask 120 is welded onto the mask frame 110.Respective ends of the mask 120 may be welded onto the first frame 111and the second frame 112, respectively, via a welded portion 124.Portions of the mask frame 110 and the mask 120 may be melted togetherby the laser beam radiated from the laser welding unit 340 illustratedin FIG. 4 and be adhered to form the welded portion 124. Referring toFIG. 5, three welded portions 124 are respectively formed at each end ofeach mask 120. However, the exemplary embodiments are not limitedthereto and a plurality of welded portions 124 may be formed.

The mask 120 may be extended and welded onto the mask frame 110.Accordingly, as illustrated in FIG. 5, after the mask frame 110 and themask 120 have been combined with each other via the welded portion 124,a first restoring force CF_1 may be applied to the mask 120 in anopposite direction with the first tensile force TF_1 illustrated in FIG.4.

The first restoring force CF_1 may be generated by a restoring force ofthe mask 120 returning to its original state, which was extended by thefirst tensile force TF_1 during the extension-welding of the mask 120after welding. The first restoring force CF_1 may affect the shapes ofthe mask 120 and the mask frame 110 to which the mask 120 may be welded.A method of compensating for the first restoring force CF_1 will bedescribed in detail with reference to FIGS. 6 and 7.

FIG. 6 is a schematic exploded view of the method of manufacturing themask frame assembly 100 of FIG. 1, and FIG. 7 is a schematic perspectiveview of the method of manufacturing the mask frame assembly 100 of FIG.1, according to one or more exemplary embodiments.

Referring to FIG. 6, the mask frame 110 may be disposed on the stage 50to perform the welding process of the mask frame 110 and the mask 120. Asecond tensile force TF_2 may be applied to the first frame 111 and thesecond frame 112 to which both ends of the mask 120 may be welded, tocompensate for the first restoring force CF_1. The second tensile forceTF_2 may be applied in a direction corresponding to that of the firstrestoring force CF_1 applied to the mask 120 illustrated in FIG. 5.

Referring to FIG. 7, the first restoring force CF_1 may be applied tothe mask 120 as illustrated in FIG. 5 after the mask frame 110 has beenwelded. A second restoring force CF_2 may be applied to the first frame111 and the second frame 112 in a direction opposite to that of thefirst restoring force CF_1. The second restoring force CF_2 may be therestoring force with respect to the second tensile force TF_2 applied tothe first frame 111 and the second frame 112 during the welding processof the mask frame 110 and the mask 120, similar to the relationshipbetween the first tensile force TF_1 and the first restoring force CF_1.

By applying the second tensile force TF_2 to the first frame 111 and thesecond frame 112 to compensate for the first restoring force CF_1applied to the mask 120, the second restoring force CF_2 with respect tothe second tensile force TF_2 may be generated in a direction oppositeto that of the first restoring force CF_1, and the deformation of themask frame 110 and the mask 120 due to the first restoring force CF_1may be reduced or prevented.

The first restoring force CF_1 and the second restoring force CF_2 maynot completely cancel out each other for various factors including, forexample, a manufacturing yield distribution and a physical propertydistribution of the mask 120, a quality of the welding, etc., and causean error in welding simulation of the mask frame 110 and the mask 120.Among the various factors, a friction between the stage 50 and the maskframe 110 may one of the biggest simulation errors.

Accordingly, the slot 116 may be disposed in the first frame 111 and thesecond frame 112, which may be vulnerable to the deformation due to thetensile force and the restoring force, and reduce the friction forcebetween the stage 50 and the mask frame 110.

The slot 116 may be disposed on a side of the first frame 111 and thesecond frame 112 that are facing the stage 50. In other words, becauseof the slot 116, the first frame 111 and the second frame 112 may not bein contact with the stage 50 during the extension-welding process of themask 120.

The slot 116 may reduce a contact surface between the stage 50 and thefirst and second frames 111 and 112, the friction force between thestage 50 and the first and second frames 111 and 112 may be reduced, andthus, the tensile forces TF_1 and TF_2 may be more precisely controlledto compensate for the restoring forces CF_1 and CF_2 applied to the maskframe 110 and the mask 120.

FIG. 8 is a cross-sectional view of a frame in FIG. 2 according to oneor more exemplary embodiments, FIG. 9 is a cross-sectional view of aframe in FIG. 2 according to one or more exemplary embodiments, and FIG.10 is a plan view of a frame in FIG. 2 according to one or moreexemplary embodiments.

Referring to FIG. 8, a cross-section of the slot 316 may have an archshape along the length direction (the y-axis) of the first frame 311 andthe second frame 312. The slot 316 having an arch shape may reduce orprevent the droop phenomenon due to the weight of the first frame 311and the second frame 312.

Referring to FIG. 9, a first frame 411 and a second frame 412 mayinclude a first protruding unit 417 extended along the width direction(the x-axis direction) of the first frame 411 and the second frame 412and therefore, at least a portion of the first frame 411 and the secondframe 412 may be in contact with the stage 50.

A plurality of first protruding units 417 illustrated in FIG. 9 may bearranged along the length direction (the y-axis direction) of the firstframe 411 and the second frame 412. FIG. 9 illustrates three firstprotruding units 417 arranged along the length of the first frame 411.However, the exemplary embodiments are not limited thereto, and one ormore of first protruding unit 417 may be arranged under the first frame411 and the second frame 412. Accordingly, the first protruding unit 417may be in line-contact with the stage 50 along the width direction (thex-axis direction) of the first frame 411 and the second frame 412.

Referring to FIG. 10, a first frame 511 and a second frame 512 mayinclude a plurality of second protruding units 517 arranged in thelength direction (the y-axis direction) and the width direction (thex-axis direction) of the first frame 511 and the second frame 512.Accordingly, the plurality of second protruding units 517 of the firstframe 511 and the second frame 512 may be in contact with the stage 50.The second protruding unit 517 may be in point-contact with the stage50.

Referring to FIG. 10, the second protruding unit 517 has a circularshape. However, the exemplary embodiments are not limited thereto. Forexample, the second protruding unit 517 may have a shape other than thecircular shape, including, but not limited to, an elliptical shape and apolygonal shape. Furthermore, referring to FIG. 10, all of secondprotruding units 517 have a circular shape. However, the exemplaryembodiments are not limited thereto, and the second protruding units 517having a circular shape, an elliptical shape and/or a polygonal shapemay be mixed and arranged under the first frame 511 and the second frame512.

FIG. 11 is a cross-sectional view of one sub-pixel of an organic lightemitting device with a light emitting layer manufactured using thedevice of the display device illustrated in FIG. 3, according to one ormore exemplary embodiments.

Referring to FIG. 11, the organic light emitting device may include adisplay substrate 1101. The display substrate 1101 may include aninsulating material having flexibility or an insulating material havingrigidity. The display substrate 1101 may be transparent,semi-transparent or opaque.

A barrier layer 1102 may be disposed on the display substrate 1101. Thebarrier layer 1102 may cover the entire upper surface of the displaysubstrate 1101. The barrier layer 1102 may include an inorganic layerand/or an organic layer.

A thin film transistor TFT may be disposed on the barrier layer 1102. Asemiconductor activation layer 1103 may be disposed on the barrier layer1102. A source region 1104 and a drain region 1105 may be formed in thesemiconductor activation layer 1103 by doping impurities of N type or Ptype. A channel region 1106 may be formed between the source region 1104and the drain region 1105 where impurities are not doped.

A gate insulating layer 1107 may be disposed on the semiconductoractivation layer 1103. The gate insulating layer 1107 may include aninorganic layer such as silicon oxide, silicon nitride, and metal oxide.The gate insulating layer 1107 may have a structure of a single layer ora stack layer.

A gate electrode 1108 may be disposed in a corresponding region on thegate insulating layer 1107. The gate electrode 1108 may include a singlelayer or stack layer of at least one of Au, Ag, Cu, Ni, Pt, Pd, Al, Mo,Cr, etc. The gate electrode 1108 may include an alloy such as Al:Nd andMo:W.

An interlayer insulating layer 1109 may be disposed on the gateelectrode 1108. The interlayer insulating layer 1109 may include aninorganic layer such as silicon oxide and silicon nitride, and/or anorganic layer.

A source electrode 1110 and a drain electrode 1111 may be disposed onthe interlayer insulating layer 1109. Contact holes may be formed in thegate insulating layer 1107 and the interlayer insulating layer 1109 byselective removing portions of the gate insulating layer 1107 and theinterlayer insulating layer 1109, and through contact holes, the sourceelectrode 1110 may be electrically connected to the source region 1104and the drain electrode 1111 may be electrically connected to the drainregion 1105.

A protective layer 1112, which may be a passivation layer and/or aplanarization layer, may be disposed on the source electrode 1110 andthe drain electrode 1111. The protective layer 1112 may include aninorganic layer of silicon oxide and silicon nitride, and/or an organiclayer of acryl, polyimide, and benzocyclobutene (BCB).

An organic light emitting device (OLED) may be disposed on the topportion of the TFT. The OLED may be disposed on the protective layer1112. The OLED may include a first electrode 1113, an intermediate layer1122, and a second electrode 1115.

The first electrode 1113 may be an anode and may include variousconductive materials. The first electrode 1113 may be a transparentelectrode or a reflective-type electrode. For example, when the firstelectrode 1113 is a transparent electrode, the first electrode 1113 mayinclude a transparent conductive layer. When the first electrode 1113 isa reflective-type electrode, the first electrode 1113 may include areflective layer and the transparent conductive layer disposed on thereflective layer.

A pixel defining layer 1114 may cover portions of the protective layer1112 and the first electrode 1113. The pixel defining layer 1114 maydefine a light emitting region of respective sub-pixels by surroundingedges of the first electrode 1113. The first electrode 1113 may bepatterned with respect to each sub-pixel. The pixel defining layer 1114may include an organic layer and/or an inorganic layer. The pixeldefining layer 1114 may be formed of a single layer or a stack layer.

An intermediate layer 1122 may be disposed on the first electrode 1113in an region of the pixel defining layer 1114 exposed by etching. Theintermediate layer 1122 may be disposed by the deposition process. Theintermediate layer 1122 may be patterned with the deposition materialdeposited through pattern holes 321 of divided masks 320 manufactured bythe mask extension-welding device 300 of FIG. 4.

The intermediate layer 1122 may include an organic emissive layer. Theintermediate layer 1122 may also include, in addition to the organicemissive layer, at least one of a hole injection layer (HIL), a holetransport layer (HTL), an electron transport layer (ETL), and anelectron injection layer (EIL). However, the exemplary embodiments arenot limited thereto, and the intermediate layer 1122 may include theorganic emissive layer and may further include various function layers.

The second electrode 1115 may include the intermediate layer 1122. Thesecond electrode 1115 may be a cathode. The second electrode 1115 mayinclude a transparent electrode and/or a reflective-type electrode. Forexample, when the second electrode 1115 is a transparent electrode, thesecond electrode 1115 may include a metal layer and a transparentconducting layer disposed on the metal layer. When the second electrode1115 is a reflective-type electrode, the second electrode 1115 mayinclude the metal layer.

According to one or more exemplary embodiments, each of the sub-pixelsformed on the display substrate 1101 may be configure to generate lightwith red, green, blue, or white color. However, the exemplaryembodiments are not limited thereto.

An encapsulation layer 1116 may be disposed on the top portion of theOLED. The encapsulation layer 1116 may protect the intermediate layer1122 and other layers from humidity and/or oxygen of the outside. Theencapsulation layer 1116 may include glass with rigidity, or a polymerresin or a film with flexibility. The encapsulation layer 1116 may havea structure in which at least one of each layer of organic layers 1117and 1119, and an inorganic layer 1118 are alternately stacked on theOLED. For example, the encapsulation layer 1116 may have structure inwhich at least one of each layer of an organic layer 1117 and 1119, andan inorganic layer 1118 are alternately stacked.

Although certain exemplary embodiments and implementations have beendescribed herein, other embodiments and modifications will be apparentfrom this description. Accordingly, the inventive concept is not limitedto such embodiments, but rather to the broader scope of the presentedclaims and various obvious modifications and equivalent arrangements.

What is claimed is:
 1. A mask frame assembly manufactured via anextension-welding process on a stage, the mask frame assemblycomprising: a mask frame disposed on the stage, the mask framecomprising a first frame and a second frame having a first length, and athird frame and a fourth frame having a second length, the second lengthbeing less than the first length; and a mask having respective endswelded and combined onto the first frame and the second frame, whereinthe first frame and the second frame comprise a slot disposed toward thestage, and wherein at least portions of the first frame and the secondframe corresponding to the slot are not in contact with the stage, andthe third frame and the fourth frame are in contact with the stage. 2.The mask frame assembly of claim 1, wherein the slot is formedthroughout the first frame and the second frame along a length directionof the first frame and the second frame, so that entire portions of thefirst frame and the second frame are not in contact with the stage. 3.The mask frame assembly of claim 2, wherein a cross-section of the slotalong the length direction of the first frame and the second frame hasan arch shape.
 4. The mask frame assembly of claim 1, wherein the firstframe and the second frame comprise first protruding units extendedalong a width direction of the first frame and the second frame, whereinat least one of the first protruding units of the first frame and thesecond frame is in contact with the stage.
 5. The mask frame assembly ofclaim 4, wherein the at least one of the first protruding units isarranged along a length direction of the first frame and the secondframe.
 6. The mask frame assembly of claim 4, wherein the at least oneof the first protruding units is in line-contact with the stage alongthe width direction of the first frame and the second frame.
 7. The maskframe assembly of claim 1, wherein the first frame and the second framecomprise second protruding units formed along length and widthdirections of the first frame and the second frame, wherein at least oneof the second protruding units of the first frame and the second frameis in contact with the stage.
 8. The mask frame assembly of claim 7,wherein the at least one of the second protruding units is inpoint-contact with the stage.
 9. The mask frame assembly of claim 7,wherein a cross-section of the at least one of the second protrudingunits in width and length directions thereof has a shape of one selectedfrom a group consisting of a circle, an ellipse, and a polygon.
 10. Amethod of manufacturing a mask frame assembly, the method comprising:disposing a mask frame on a stage, the mask frame comprising a firstframe and a second frame having a first length, and a third frame and afourth frame having a second length, the second length less than thefirst length; applying a first extension force to a mask by clampingboth ends of the mask in a length direction of the mask; applying asecond extension force to the first frame and the second frame on whichboth ends of the mask are disposed, the second extension force having andirection opposite to the first extension force; and welding respectiveends of the mask to the first frame and the second frame, wherein thefirst frame and the second frame comprise a slot disposed toward thestage, and wherein at least portions of the first frame and the secondframe corresponding to the slot not in contact with the stage, and thethird frame and the fourth frame are in contact with the stage.
 11. Themethod of claim 10, wherein the slot is formed throughout the firstframe and the second frame along a length direction of the first frameand the second frame so that entire portions of the first frame and thesecond frame are not in contact with the stage.
 12. The method of claim11, wherein a cross-section of the slot along the length direction ofthe first frame and the second frame has an arch shape.
 13. The methodof claim 10, wherein the first frame and the second frame comprise firstprotruding units extended along a width direction of the first frame andthe second frame, wherein at least one of the first protruding units ofthe first frame and the second frame is in contact with the stage. 14.The method of claim 13, wherein the at least one of the first protrudingunits is arranged along the length direction of the first frame and thesecond frame.
 15. The method of claim 13, wherein the at least one ofthe first protruding units is in line-contact with the stage along thewidth direction of the first frame and the second frame.
 16. The methodof claim 10, wherein the first frame and the second frame comprisesecond protruding units formed along length and width directions of thefirst frame and the second frame, wherein at least one of the secondprotruding units of the first frame and the second frame is in contactwith the stage.
 17. The method of claim 16, wherein the at least one ofthe second protruding units is in point-contact with the stage.
 18. Themethod of claim 16, wherein a cross-section of the at least one of thesecond protruding units in width and length directions thereof has atleast one shape of a circle, an ellipse and a polygon.
 19. A method ofmanufacturing a display device which comprises a first electrode and asecond electrode facing each other on a substrate and an organic layerdisposed between the first electrode and the second electrode, themethod comprising depositing the organic layer and depositing the secondelectrode on the organic layer using a mask frame, wherein a mask frameassembly comprises the mask frame comprising a first frame and a secondframe having a first length, and a third frame and a fourth frame havinga second length, the second length less than the first length, and amask having respective ends welded and combined onto the first frame andthe second frame, and wherein the first frame and the second framecomprise a slot disposed facing away from the mask.
 20. The method ofclaim 19, wherein the mask frame assembly further comprises at least oneprotruding unit disposed in the slot, the at least one protruding unithaving a height identical to a depth of the slot.